Access Description
Technical Offering
Main Equipment
Typical Application
Case Study
Responsible
Key Specifications
Thin-film Solid-state Rechargeable Micro-batteries
- Access Description
- Access to capabilities for Material and Process evaluation of Thin Film Solid State rechargeable micro-batteries
- Technical Offering
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- Use of a reference Thin film solid state Battery Architecture with dedicated set of masks (up to 200 mm substrates) and qualified performances to benchmark added value of new material and/or process
- Protocols and dedicated Test Vehicle to evaluate and characterize packaging solutions active battery material and processes performances
- Protocols and dedicated Test Vehicle to evaluate and characterize packaging solutions and thin film moisture barrier performances
- Stacking of existing standalone thin film batteries
- Raman characterisation methodology for thin layers and electrodes
- Main Equipment
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- Sputtering PVD deposition tools (cluster type) allowing deposition with different targets sizes (from 2″ to 13″ diameter) allowing preliminary tests of new materials and qualification on more industrial materials
- PECVD, ALD and spin coater tools for barrier materials and processes
- Patterning processes and tools for actives battery layers: photolithography, laser
- Assessment of electrical performances in button cell configurations
- Ageing tools for barrier films
- Typical applications
- Commercialisation of electrical energy storage solutions to enable energy harvesters as an energy sources for IoT sensors, for example to overcome the intermittent nature of the harvesting source such as solar or vibrational energy.
- Case Study
- An SME or research team are developing new materials or new manufacturing processes for a smart battery but they need access to optimise this and benchmark with state of the art material in a reference architecture. EnABLES will provide access to the facilities required.
- Responsible
- Dr Raphaël Salot
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| ENDURA Cluster Tool | MBraun argon glove box | CORIAL 210 IL ICP-RIE etching tool |
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